Statistics
Publications
1
Citations
36
H-Index
1
Active since
2004
Affiliations
Nanonex (United States)(Current)
M. Li is an author at Nanonex (United States) specializing in x-ray optics, x-ray lithography, and nanoimprint lithography.
Publications per year
2004–2004
1
1
High fidelity blazed grating replication using nanoimprint lithography
Chih‐Hao Chang, Juan Montoya, Mireille Akilian et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 36 citations
Natural Sciences, Materials Engineering, Materials Science +13
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