Concepedia

A. Hasper

AH

Statistics

Publications

5

Citations

158

H-Index

5

Active since

1991

Affiliations

University of Twente(Current)

Delft University of Technology

Genus (United States)

A. Hasper is an author at University of Twente specializing in applied physics, refrigeration, and thermal engineering.

Top concepts

Publications per year

1991–1993

5

Publications

5

Modeling and Optimization of the Step Coverage of Tungsten LPCVD in Trenches and Contact Holes

A. Hasper, J. Holleman, J. Middelhoek et al. · Journal of The Electrochemical Society · 1991 · 65 citations · Full text

Transport Phenomena in Tungsten LPCVD in a Single‐Wafer Reactor

Chris R. Kleijn, C. J. Hoogendoorn, A. Hasper et al. · Journal of The Electrochemical Society · 1991 · 57 citations · Full text

Loading Effects on Kinetical and Electrical Aspects of Silane‐Reduced Low‐Pressure Chemical Vapor Deposited Selective Tungsten

J. Holleman, A. Hasper, Chris R. Kleijn · Journal of The Electrochemical Society · 1993 · 14 citations · Full text

On the Mechanism of the Step Coverage of Blanket Tungsten Chemical Vapor Deposition

Jurriaan Schmitz, A. Hasper · Journal of The Electrochemical Society · 1993 · 12 citations · Full text

Heat transport in cold-wall single-wafer low pressure chemical-vapor-deposition reactors

A. Hasper, Jurriaan Schmitz, J. Holleman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 10 citations · Full text

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