Concepedia
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Publications
1
Citations
16
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Active since
2008
M. Holzherr is an author specializing in plasma deposition, thin-film deposition, and chemical vapor deposition.
Publications per year
2008–2008
Influence of hollow cathode plasma on AlCrN-thin film deposition with vacuum arc evaporation sources
M. Holzherr, M. Falz, Thomas Schmidt · Surface and Coatings Technology · 2008 · 16 citations
Natural Sciences, Materials Science, Physics +16
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