Robert Heinke

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Active since

2021

Affiliations

Leibniz Institute of Surface Engineering(Current)

Robert Heinke is an author at Leibniz Institute of Surface Engineering specializing in plasma-surface interactions, laser material processing, and electronic materials.

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Publications per year

2021–2022

Publications

Dry Etching of Germanium with Laser Induced Reactive Micro Plasma

Martin Ehrhardt, Pierre Lorenz, Jens Bauer et al. · Lasers in Manufacturing and Materials Processing · 2021 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Low surface damage laser processing of silicon by laser-induced plasma etching (LIPE)

Robert Heinke, Martin Ehrhardt, Jens Bauer et al. · Applied Surface Science · 2022 · 13 citations

Engineering, Materials Engineering, Materials Science +14

Dry etching of monocrystalline silicon using a laser-induced reactive micro plasma

Robert Heinke, Martin Ehrhardt, Pierre Lorenz et al. · Applied Surface Science Advances · 2021 · 12 citations · Full text

Engineering, Materials Engineering, Materials Science +16

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