Jon Sierra Suarez

Effect of Conditioning Downforce and Pad Break-In Time on Pad Surface Micro-Texture

Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2018 · 21 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Effect of Conditioner Type and Downforce, and Pad Break-In Time, on Pad Surface Micro-Texture in Chemical Mechanical Planarization

Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2018 · 19 citations

Engineering, Materials Engineering, Materials Science +17

Tribological, Thermal and Kinetic Characterization of SiO ₂ and Si ₃ N ₄ Polishing for STI CMP on Blanket and Patterned Wafers

Juan Cristobal Mariscal, Jeffrey McAllister, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2020 · 13 citations

Engineering, Materials Engineering, Materials Science +17

Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance

Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno et al. · Micromachines · 2019 · 10 citations · Full text

Engineering, Materials Engineering, Materials Science +17