Statistics
Publications
6
Citations
141
H-Index
6
Active since
1985
Affiliations
Rutherford Appleton Laboratory(Current)
Y. Owadano is an author at Rutherford Appleton Laboratory specializing in engineering, high-power lasers, and applied physics.
Publications per year
1985–1989
6
6
Soft X-ray contact microscopy using laser plasma sources
A. G. Michette, Penggen Cheng, R W Easons et al. · Journal of Physics D Applied Physics · 1986 · 32 citations
X-ray lithography using a KrF laser–plasma source
F. O’Neill, M. C. Gower, I. C. E. Turcu et al. · Applied Optics · 1986 · 24 citations
Materials Science, Engineering, Electron-beam Lithography +11
Development of a high-power KrF laser system, ASHURA
Y. Owadano, I. Okuda, Yuji Matsumoto et al. · Laser and Particle Beams · 1989 · 22 citations
Development of a 1-kJ KrF Laser System for Laser Fusion Research
Y. Owadano, I. Okuda, M. Tanimoto et al. · Fusion Technology · 1987 · 11 citations
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