Statistics
Publications
1
Citations
11
H-Index
1
Active since
1997
Affiliations
Joseph A. Felker is an author at Integrated Solutions for Systems (United States) specializing in projection lithography, optics, and electronic materials.
Publications per year
1997–1997
1
1
SCALPEL proof-of-concept system: preliminary lithography results
W. K. Waskiewicz, Christopher J. Biddick, Myrtle I. Blakey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 11 citations
Engineering, Manufacturing Engineering, Electronic Materials +11
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