Statistics
Publications
1
Citations
10
H-Index
1
Active since
2012
Affiliations
KLA (United States)(Current)
Chui-Fu Chiu is an author at KLA (United States) specializing in overlay control, integrated circuit design, and manufacturing engineering.
Publications per year
2012–2012
1
1
Overlay control methodology comparison: field-by-field and high-order methods
Chun-Yen Huang, Chui-Fu Chiu, Wen-Bin Wu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 10 citations
Engineering, Manufacturing Engineering, Digital Fabrication +10
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