Concepedia

Matthias Baumkötter

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Publications

1

Citations

24

H-Index

1

Active since

2016

Affiliations

SENTECH Instruments (Germany)(Current)

Matthias Baumkötter is an author at SENTECH Instruments (Germany) specializing in microwave plasma sources, materials science, and precursor chemistry.

Publications per year

2016–2016

1

Publications

1

Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources

Sebastian Franke, Matthias Baumkötter, Carsten Monka et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +15

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