Masaru Miyashita

Publications

Citations

H-Index

2014

Active since

Affiliations

Sumitomo Heavy Industries (Japan)(Current)

Masaru Miyashita is an author at Sumitomo Heavy Industries (Japan) specializing in chemical engineering, analytical chemistry, and quantitative analysis.

ORCID

Top concepts

ChemistryThin FilmsEngineeringSurface ScienceElectrochemistryMaterial ScienceOptical DiagnosticsAnalytical ChemistryChemical EngineeringQuantitative Analysis

Publications per year

2014–2014

Publications

Quantitative analysis of ionization rates of depositing particles in reactive plasma deposition using mass-energy analyzer and Langmuir probe

Hisashi Kitami, Masaru Miyashita, Toshiyuki Sakemi et al. · Japanese Journal of Applied Physics · 2014 · 42 citations

Langmuir Probe, Engineering, Chemistry +19

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