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Tomasz Michna

TM

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Publications

2

Citations

33

H-Index

2

Active since

2011

Affiliations

Dublin City University(Current)

Tomasz Michna is an author at Dublin City University specializing in engineering, electrical engineering, and microelectronics.

Top concepts

Publications per year

2011–2011

2

Publications

2

Characterisation of thin film silicon films deposited by plasma enhanced chemical vapour deposition at 162MHz, using a large area, scalable, multi-tile-electrode plasma source

Eamonn Monaghan, Tomasz Michna, Cezar Gaman et al. · Thin Solid Films · 2011 · 23 citations

, , +9

Characterisation of an RF power splitter for multi-tile PECVD systems application

Tomasz Michna, A. R. Ellingboe · Current Applied Physics · 2011 · 10 citations

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