Statistics
Publications
2
Citations
26
H-Index
2
Active since
2020
Lufeng Liao is an author at Shanghai Institute of Optics and Fine Mechanics specializing in diffraction pattern analysis, pattern generation, and coverage rules modeling.
Publications per year
2020–2022
2
2
Critical pattern selection method for full-chip source and mask optimization
Lufeng Liao, Sikun Li, Xiangzhao Wang et al. · Optics Express · 2020 · 16 citations · Full text
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