Concepedia

Y.L. Wang

YW

Statistics

Publications

2

Citations

30

H-Index

2

Active since

2005

Affiliations

National University of Tainan(Current)

National Yang Ming Chiao Tung University

Y.L. Wang is an author at National University of Tainan specializing in materials engineering, materials science, and chemical vapor deposition materials.

Publications per year

2005–2005

2

Publications

2

Novel slurry solution for dishing elimination in copper process beyond 0.1-μm technology

Kaiqing Chen, Y.L. Wang, Chun‐Hua Liu et al. · Thin Solid Films · 2005 · 16 citations

, , +6

Effect of deposition temperature and oxygen flow rate on properties of low dielectric constant SiCOH film prepared by plasma enhanced chemical vapor deposition using diethoxymethylsilane

Yulin Cheng, Y.L. Wang, G.J. Hwang et al. · Surface and Coatings Technology · 2005 · 14 citations

, , +17

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