Naoto Kaguchi

Correlation between volume fraction of clusters incorporated into a-Si:H films and hydrogen content associated with Si–H2 bonds in the films

Kazunori Koga, Naoto Kaguchi, Masaharu Shiratani et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 41 citations

Engineering, Chemistry, Plasma Processing +16

Cluster-eliminating filter for depositing cluster-free <i>a</i>-Si:H films by plasma chemical vapor deposition

Kazunori Koga, Naoto Kaguchi, Kouki Bando et al. · Review of Scientific Instruments · 2005 · 21 citations

Engineering, Chemistry, Chemical Deposition +17

Species responsible for Si–H2 bond formation in a-Si:H films deposited using silane high frequency discharges

Masaharu Shiratani, Kazunori Koga, Naoto Kaguchi et al. · Thin Solid Films · 2005 · 17 citations

Engineering, Si–h2 Bond Formation, Surface Science +6

Which is harder SOA test for SiC MOSFET to do Unclamped Inductive Switching (UIS) or Unloaded Short Circuit mode Switching (USCS)? Does UIS play a role of USCS?

Kazuhiko Hasegawa, Kensuke Taguchi, Yasuhiro Kagawa et al. · 2020 · 11 citations