Statistics
Publications
2
Citations
38
H-Index
2
Active since
2003
Affiliations
Nikon (Japan)(Current)
Masato Hamatani is an author at Nikon (Japan) specializing in interferometry, optical metrology, and optical interferometry.
Publications per year
2003–2009
2
2
An innovative platform for high-throughput high-accuracy lithography using a single wafer stage
Yuichi Shibazaki, Hirotaka Kohno, Masato Hamatani · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 18 citations
Engineering, Manufacturing Engineering, Digital Fabrication +13
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