Concepedia

Jänis Järvilehto

JJ

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Publications

1

Citations

11

H-Index

1

Active since

2023

Affiliations

Aalto University(Current)

Jänis Järvilehto is an author at Aalto University specializing in thin-film deposition, natural sciences, and surface engineering.

Publications per year

2023–2023

1

Publications

1

Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion–reaction model and a ballistic transport–reaction model

Jänis Järvilehto, Jorge Velasco, Jihong Yim et al. · Physical Chemistry Chemical Physics · 2023 · 11 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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