Balamurugan Deivendran

Statistics

Publications

Citations

H-Index

Active since

2020

Affiliations

Indian Institute of Technology BHU(Current)

Banaras Hindu University

Defence Materials and Stores Research and Development Establishment

Balamurugan Deivendran is an author at Indian Institute of Technology BHU specializing in chemical vapor deposition, heat transfer in reactors, and materials science.

Publications per year

2020–2024

Publications

Virtual metrology for chemical mechanical planarization of semiconductor wafers

Balamurugan Deivendran, Vishnu Swaroopji Masampally, Naga Ravikumar Varma Nadimpalli et al. · Journal of Intelligent Manufacturing · 2024 · 23 citations

Engineering, Manufacturing Engineering, Materials Science +16

3D Modeling and optimization of SiC deposition from CH3SiCl3/H2 in a commercial hot wall reactor

Balamurugan Deivendran, V. M. Shinde, Harish Kumar et al. · Journal of Crystal Growth · 2020 · 17 citations

Engineering, Materials Engineering, Materials Science +14

Investigation of transport processes in a commercial hot wall CVD reactor with multi-substrates for high-quality pyrocarbon deposition

V. M. Shinde, Balamurugan Deivendran, Harish Kumar et al. · Surface and Coatings Technology · 2021 · 15 citations

Engineering, Materials Engineering, Materials Science +8

1–3 of 3