A. Yu. Karabekov

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Citations

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Active since

1999

Affiliations

P.N. Lebedev Physical Institute of the Russian Academy of Sciences(Current)

A. Yu. Karabekov is an author at P.N. Lebedev Physical Institute of the Russian Academy of Sciences specializing in surface roughness, thin film surface characterization, and critical dimension metrology.

Publications per year

1999–2003

Publications

Comparative study of the roughness of optical surfaces and thin films by use of x-ray scattering and atomic force microscopy

Angela Duparré, Stefan Jakobs, A. Yu. Karabekov et al. · Applied Optics · 1999 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +17

Using monte carlo simulation for accurate critical dimension metrology of super small isolated poly‐lines

A. Yu. Karabekov, Oren Zoran, Zvika Rosenberg et al. · Scanning · 2003 · 10 citations

Engineering, Electrical Engineering, Metrology +16

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