Concepedia

G. Mazaleyrat

GM

3

Publications

116

Citations

3

H-Index

2005

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

Laboratoire d'Analyse et d'Architecture des Systèmes

G. Mazaleyrat is an author at Centre National de la Recherche Scientifique specializing in nanoscale modeling, physics, and surface science.

Top concepts

PhysicsEngineeringApplied PhysicsSurface ScienceMaterial ScienceNanoscale ModelingMicroelectronicsMaterials EngineeringChemistryThin Films

Publications per year

2005–2009

3

Publications

3

A methodology for the kinetic Monte Carlo simulation of alumina atomic layer deposition onto silicon

G. Mazaleyrat, Alain Estève, L. Jeloaica et al. · Computational Materials Science · 2005 · 47 citations

Materials Science, Materials Engineering, Engineering +9

Multiscale Modeling of the Atomic Layer Deposition of HfO<sub>2</sub> Thin Film Grown on Silicon: How to Deal with a Kinetic Monte Carlo Procedure

A. Dkhissi, Alain Estève, Cédric Mastail et al. · Journal of Chemical Theory and Computation · 2008 · 44 citations

Engineering, Material Simulation, Computational Chemistry +21

Nucleation and growth of atomic layer deposition of HfO2 gate dielectric layers on silicon oxide: a multiscale modelling investigation

A. Dkhissi, G. Mazaleyrat, Alain Estève et al. · Physical Chemistry Chemical Physics · 2009 · 25 citations

Engineering, Silicon Oxide, Chemical Deposition +18

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