Beam-solid interactions, physical phenomena

Abstract

This volume contains papers presented at the symposium on beam-solid interactions: physical phenomena. This symposium was devoted to both fundamental and applied research on ion, laser, and electron beam modification and deposition of materials, with particular emphasis on the physical aspects of these interactions. Areas covered include ion-assisted deposition, ion-induced growth, buried layers, ion beam mixing, numerical modeling, novel analysis techniques, fast transient processing, and separate sessions on the beam modification of ceramics, semiconductors, and metals.