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Characterization of ZnO thin film grown on c-plane substrates by MO-CVD: Effect of substrate annealing temperature, vicinal-cut angle and miscut direction

Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsMiscut DirectionSubstrate Annealing TemperatureZno Thin FilmThin FilmsEpitaxial GrowthChemical Vapor DepositionThin Film Processing