Journal of the Korean Physical Society · 2009 · 14 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesThin FilmsChemical Vapor DepositionEpitaxial GrowthSemiconductor Crystal GrowthThin Film NucleationThin-film DepositionFilm Growth MechanismsOxide Growth KineticsOxide Layer GrowthProcess ParametersProcess Parameters OptimizationThin-film Growth KineticsThin-film Growth Mechanisms