Publication | Closed Access
Effect of coadsorption of water and alcohol vapor on the nanowear of silicon
26
Citations
37
References
2015
Year
Materials ScienceChemical EngineeringEngineeringNanomaterialsNanotechnologySurface ScienceApplied PhysicsAlcohol VaporNanofabricationSilicon On InsulatorChemical Vapor Deposition
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