Publication | Open Access
Analysis of the Atomic Layer Deposited Al2O3 field-effect passivation in black silicon
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Citations
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References
2015
Year
Electrical EngineeringEpitaxial GrowthEngineeringBlack SiliconSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSemiconductor Device
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