Publication | Closed Access
The effect of amino acid addition in CeO2-based slurry on SiO2/Si3N4 CMP: Removal rate selectivity, morphology, and mechanism research
20
Citations
51
References
2024
Year
Sewage Sludge TreatmentMolecular SieveChemical EngineeringRemoval Rate SelectivityEngineeringMolecular SievingWater TreatmentAmino Acid AdditionDesulfurizationSio2/si3n4 CmpWaste Management
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