Laser Fabrication of Humidity Sensors on Ethanol-Soaked Polyimide for Fully Contactless Respiratory Monitoring

Abstract

Humidity-sensor-based fully contactless respiratory monitoring can eliminate the discomfort and infection risks associated with any wearable device. However, challenges in the facile fabrication of highly sensitive humidity sensors continue to hinder their widespread application for fully contactless respiratory monitoring. In this study, we introduce a simple method to fabricate highly sensitive humidity sensors. Our method employs laser-induced graphene (LIG) on an ethanol-soaked polyimide (PI) film as the electrode of the humidity sensor. The ethanol-soaked PI between adjacent LIG electrodes functions as the sensing material, enabling ion-conductive humidity sensing. Compared to the LIG humidity sensors fabricated on untreated PI films, LIG humidity sensors fabricated on ethanol-soaked PI films exhibit superior performance with higher linearity ( R 2 = 0.9936), reduced hysteresis (Δ H = 5.1% RH), and increased sensitivity (0.65%/RH). Notably, the LIG humidity sensor fabricated on the ethanol-soaked PI film can detect a person’s breathing from a distance of 30 cm, a capability not achieved by sensors fabricated on untreated PI films. Moreover, incorporating these LIG humidity sensors into an array further enhances both the detection distance and the sensitivity for respiratory monitoring. Experimental results demonstrate that the LIG humidity sensor array can be employed for fully contactless on-bed respiration monitoring and for continuous, fully contactless monitoring of the respiratory rate during treadmill exercise. These results highlight the great potential of our LIG humidity sensors for various practical applications in medicine and sports.