Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS - Concepedia

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Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS

18

Citations

48

References

2024

Year

Kristian A. Reck, Yusuf Bulut, Zhuijun Xu, Suzhe Liang, Thomas Strunskus, Benedikt Sochor, Holger Gerdes, Ralf Bandorf, Peter Müller‐Buschbaum, Stephan V. Roth,

Applied Surface Science

References

	Year	Citations

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