Vacuum · 2024 · 37 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDevice CharacterizationSemiconductor Device MaterialsSemiconductor InterfacesThermal DesignThermal Properties Of SemiconductorsWide Band Gap SemiconductorsElectrical Resistivity ReductionResistivitySemiconductor CharacterizationSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon WafersTemperature-dependent ResistivityThermal Management Of Semiconductor Devices
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