All-Solution-Processed High-Performance MoS₂ Thin-Film Transistors with a Quasi-2D Perovskite Oxide Dielectric

Abstract

Assembling solution-processed van der Waals (<i>vdW</i>) materials into thin films holds great promise for constructing large-scale, high-performance thin-film electronics, especially at low temperatures. While transition metal dichalcogenide thin films assembled in solution have shown potential as channel materials, fully solution-processed <i>vdW</i> electronics have not been achieved due to the absence of suitable dielectric materials and high-temperature processing. In this work, we report on all-solution-processed<i>vdW</i> thin-film transistors (TFTs) comprising molybdenum disulfides (MoS₂) as the channel and Dion-Jacobson-phase perovskite oxides as the high-permittivity dielectric. The constituent layers are prepared as colloidal solutions through electrochemical exfoliation of bulk crystals, followed by sequential assembly into a semiconductor/dielectric heterostructure for TFT construction. Notably, all fabrication processes are carried out at temperatures below 250 °C. The fabricated MoS₂ TFTs exhibit excellent device characteristics, including high mobility (>10 cm² V^-1 s^-1) and an on/off ratio exceeding 10⁶. Additionally, the use of a high-<i>k</i> dielectric allows for operation at low voltage (∼5 V) and leakage current (∼10^-11 A), enabling low power consumption. Our demonstration of the low-temperature fabrication of high-performance TFTs presents a cost-effective and scalable approach for heterointegrated thin-film electronics.