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Effect of bias voltage on the erosion performance of TiAlSiN coatings on TC6 substrate by high power impulse magnetron sputtering

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringSurface ScienceApplied PhysicsBias VoltageThin FilmsMicroelectronicsSurface ProcessingDepth-graded Multilayer CoatingErosion PerformanceThin Film ProcessingTialsin Coatings