Publication | Closed Access
Synergistically enhanced Si3N4/Cu heterostructure bonding by laser surface modification
29
Citations
28
References
2023
Year
Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsSiliceneLaser Surface ModificationLaser-assisted DepositionSilicon On InsulatorLaser-surface Interactions
| Year | Citations | |
|---|---|---|
Page 1
Page 1