Brno University of Technology Digital Library (Brno University of Technology) · 2012 · 30 citations · 0 references
Open access
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsSensorsCapacitive SensingHumidity SensorsMechanical SensorsPressure MeasurementPressure SensorsRelative HumidityCapacitive Humidity SensingCapacitive Humidity SensorsCapacitive Pressure SensingCapacitive Pressure SensorsCeramic SensorsHumidityPressure Sensor Stability
The effect of the humidity of the surrounding atmosphere on the characteristics of capacitive structures is a known problem for capacitive gas-pressure sensors. However, the use of a differential mode of operation can provide a good solution – only the manufacturing of the ceramic structures with the appropriate pairs of capacitive sensing elements remains a major challenge. In order to find a compromise solution, the effect of the humid atmosphere and the moisture on the exterior of an LTCC-based capacitive pressure sensor was inspected closely through experimental and numerical analyses of various situations.