Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space

Abstract

On-chip waveguide sensors are potential candidates for deep-space exploration because of their high integration and low power consumption. Since the fundamental absorption of most gas molecules exists in the mid-infrared (e.g., 3-12 μm), it is of great significance to fabricate wideband mid-infrared sensors with high external confinement factor (ECF). To overcome the limited transparency window and strong waveguide dispersion, a chalcogenide suspended nanorib waveguide sensor was proposed for ultra-wideband mid-infrared gas sensing, and three waveguide sensors (WG₁-WG₃) with optimized dimensions exhibit a wide waveband of 3.2-5.6 μm, 5.4-8.2 μm, and 8.1-11.5 μm with exceptionally high ECFs of 107-116%, 107-116%, and 116-128%, respectively. The waveguide sensors were fabricated by a two-step lift-off method without dry etching to reduce the process complexity. Experimental ECFs of 112%, 110%, and 110% were obtained at 3.291 μm, 4.319 μm, and 7.625 μm, respectively, through methane (CH₄) and carbon dioxide (CO₂) measurements. A limit of detection of 5.9 ppm was achieved for an averaging time of 64.2 s through the Allan deviation analysis of CH₄ at 3.291 μm, leading to a comparable noise equivalent absorption sensitivity of 2.3 × 10^-5 cm^-1 Hz^-1/2 as compared to the hollow-core fiber and on-chip gas sensors.