Highly selective capacitive micromachined ultrasonic transducer–based miniature gravimetric CO2 sensor with in-situ calibration for relative humidity

Dovydas Barauskas, Donatas Pelenis, Mindaugas Dzikaras, Gailius Vanagas, Marius Mikolajūnas, Jonas Baltrušaitis, Darius Viržonis

Sensors and Actuators B Chemical · 2023 · 12 citations · 21 references

Concepts

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