Sensors and Actuators B Chemical · 2023 · 12 citations · 21 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsSensorsUltrasoundCapacitive SensingGas SensorsHumidity SensorsTransducer TechnologyUltrasonicsUltrasound InstrumentationCapacitive Micromachined Ultrasonic TransducersGravimetric MeasurementMiniaturized Humidity SensorsMiniaturized TransducersRelative Humidity AssessmentRelative Humidity MeasurementTransducer CalibrationUltrasonic Transducers
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