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The influence of the nanostructure design on the optical, electrical and thermal properties of TiNx thin films prepared by reactive magnetron sputtering

Materials ScienceElectrical EngineeringOptical MaterialsReactive Magnetron SputteringEngineeringNanomaterialsNanotechnologyTinx Thin FilmsApplied PhysicsNanostructure SynthesisMagnetic Thin FilmsThin FilmsNanostructure DesignThin Film ProcessingNanophotonicsNanostructures