A novel approach to using artificial intelligence in coordinate metrology including nano scale

Abstract

• Artificial Intelligence as an important tool in length metrology from nano scale . • AI methods enable classification, prediction, decision-making and optimization. • New ideas of AI for preparation and realization of measurement process are presented. • An example showing AI in analysis of interference fringes. • Artificial Intelligence supports an operator in measurement process. The applications of modern length and angle metrology continue to pose new challenges for manufacturers and operators of measuring equipment, starting from nano scale . One method to support measurement processes is the use of artificial intelligence. As an essential part of Industry 4.0 and Metrology 4.0 strategies, it actively supports humans in executing measurement activities. The use of artificial intelligence in this area is determined by technological and social factors, as the shortage of highly skilled operators is becoming increasingly acute. The paper discusses the possibilities of using artificial intelligence in coordinate metrology. Ideas including the selection of the measurement strategy, conditions, filtering techniques, as well as self-verification or even self-calibration were presented. Schemes of procedures using local and global databases of applications and measuring instruments are presented. A new area application in the analysis of interference fringes is shown, with method descriptions and experimental results.