Compact Slow-Light Integrated Silicon Electro-Optic Modulators With Low Driving Voltage

Abstract

In this work, we report two slow-light enhanced silicon optical modulators with electro-optic (EO) phase shifter lengths of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$500~\mu \text{m}$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$150~\mu \text{m}$ </tex-math></inline-formula> that were fabricated using the AIM Photonics foundry. Tunable power splitters give a threefold increase in the extinction ratio (ER). An eye diagram operating at 10 Gbps was achieved using a very low signal voltage of Vpp = 500mV. The energy per bit is 57.5 fJ/bit and 45 fJ/bit for the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$500~\mu \text{m}$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$150~\mu \text{m}$ </tex-math></inline-formula> modulators, respectively. The nonlinearity of the devices were measured yielding spur-free dynamic range of 113.2 dB/Hz2/3. The <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$150~\mu \text{m}$ </tex-math></inline-formula> length MZM is among the smallest optical modulators using Bragg gratings for slow light ever reported and results in an estimated modulation efficiency of 0.33 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{V}\cdot $ </tex-math></inline-formula> cm.