Fusion Science & Technology · 2023 · 13 citations · 25 references
Materials ScienceMaterials EngineeringBoron NitrideEngineeringPhysicsSurface ScienceApplied PhysicsNuclear Fusion TargetsIcf TargetsNuclear MaterialsDeposition RateThin FilmsBoron CarbideFusion Reactor MaterialChemical Vapor DepositionThin Film ProcessingCarbide
Boron carbide is an attractive ablator for next-generation inertial confinement fusion (ICF) targets. Here we describe several aspects of our ongoing systematic studies of the deposition and processing of B4C coatings for ICF targets. We show that residual compressive stress in films can be reduced and the deposition rate increased by N-doping. We also demonstrate successful Si substrate etching and surface polishing and discuss remaining challenges and offer potential solutions to the buildup of particulates in the deposition chamber during prolonged coating runs, control of nodular growth defects, and lateral nonuniformity of film properties for deposition conditions with relatively low target-to-substrate distances.
25
Dusty Plasmas in the Laboratory, Industry, and Space
R. L. Merlino, J. Goree · Physics Today · 2004 · 425 citations · Full text
Review of Growth Defects in Thin Films Prepared by PVD Techniques
P. Panjan, Aljaž Drnovšek, Peter Gselman et al. · Coatings · 2020 · 328 citations · Full text