Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application

Ranjith Punathil Meethal, Palwasha Jalalzai, Muskan, Sumit Kumar, Peter Jerome, Andreas Klipp, Tae‐Gon Kim, Jin-Goo Park

Journal of Colloid and Interface Science · 2023 · 29 citations · 85 references

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