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Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application

Materials ScienceChemical EngineeringCorrosion ProtectionEngineeringCorrosionTungsten Corrosion InhibitorAlkaline MediaBenzethonium ChlorideChemistryCorrosion ResistanceElectrochemistryCorrosion Inhibition