Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments - Concepedia

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Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

DOI Full Paper Access

57

Citations

41

References

2023

Year

Chen Wu, Xudong Fang, Qiang Kang, Ziyan Fang, Junxia Wu, Hongtao He, Dong Zhang, Libo Zhao, Bian Tian, Ryutaro Maeda,

Microsystems & Nanoengineering

References

	Year	Citations

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