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First direct observation of the built-in electric field and oxygen vacancy migration in ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> film during electrical cycling

29

Citations

30

References

2023

Year

Abstract

By combining differential phase contrast scanning transmission electron microscope (DPC-STEM) and Energy Disperse Spectroscopy (EDS) analysis, the migration of oxygen vacancies and the evolution of the built-in field in ferroelectric HfO 2 are observed for the first time.

References

YearCitations

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