Publication | Open Access
Integrated silicon photonic MEMS
Niels Quack,
Alain Yuji Takabayashi,
Hamed Sattari,
Pierre Edinger,
Gaehun Jo,
Simon J. Bleiker,
Carlos Errando-Herranz,
Kristinn B. Gylfason,
Frank Niklaus,
Umar Khan,
Microsystems & Nanoengineering