In-situ non-destructive removal of tin particles by low-energy plasma for imitation of EUV optical mirrors self-cleaning - Concepedia

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In-situ non-destructive removal of tin particles by low-energy plasma for imitation of EUV optical mirrors self-cleaning

19

Citations

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References

2023

Year

Sishu Wang, Zongbiao Ye, Guo Pu, Jianxing Liu, Li Yang, Wenna Jing, Mingming Yu, Fangling Yang, Yichao Peng, Fujun Gou,

Materials ScienceOptical MaterialsEngineeringIn-situ Non-destructive RemovalApplied PhysicsTin ParticlesLow-energy PlasmaPlasma Processing

References

	Year	Citations

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