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Influence of N concentration on structure and properties of (AlCrMoTiV)Nx films by co-filter cathodic vacuum arc deposition

Materials ScienceMaterials EngineeringChemical EngineeringCo-filter Cathodic VacuumEngineeringSurface ScienceApplied PhysicsNx FilmsN ConcentrationVacuum DeviceThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing