Concepedia

Publication | Closed Access

Inherent selective pulsed chemical vapor deposition of aluminum oxide in nm scale

DOI

10

Citations

26

References

2023

Year

Yunil Cho, James Huang, Zichen Zhang, Kesong Wang, Ping‐Che Lee, Chanyoung Kim, Keith T. Wong, Srinivas Nemani, Ellie Yieh, Andrew C. Kummel
Applied Surface Science

References

YearCitations

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