Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance - Concepedia

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Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance

DOI Full Paper Access

22

Citations

50

References

2023

Year

Xiufei Hu, Ming Li, Yingnan Wang, Yan Peng, Gongbin Tang, Xiwei Wang, Bin Li, Yiqiu Yang, Mingsheng Xu, Xiangang Xu,

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsChemical Vapor DepositionMicrowave Plasma CvdEnhanced Thermal Performance2-Inch Diamond FilmsPlasma Processing

References

	Year	Citations

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