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Effect of growth pressure on sulfur content of RF-magnetron sputtered WS2 films and thermal oxidation properties of them toward using Pd decorated WO3 based H2 gas sensor

Materials ScienceMaterials EngineeringH2 Gas SensorEngineeringOxide ElectronicsGas SensorSurface ScienceApplied PhysicsGrowth PressureSulfur ContentThin FilmsChemical Vapor DepositionElectrochemical Gas Sensor