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Broadband MSM photodetector based on S-doped black silicon fabricated by femtosecond laser

PhotonicsEngineeringOptical Transmission SystemOptical PropertiesApplied PhysicsBroadband Msm PhotodetectorS-doped Black SiliconOptoelectronic DevicesPhotonic Integrated CircuitFemtosecond LaserOptical CommunicationPhotonic DeviceOptoelectronicsElectro-optics Device