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Experimental and density functional theory study of benzohydroxamic acid as a corrosion inhibitor in chemical mechanical polishing of Co interconnects

Materials ScienceChemical EngineeringCorrosion InhibitorEngineeringCorrosion ProtectionCorrosionNatural SciencesSurface ScienceInterfacial PhenomenaBenzohydroxamic AcidChemistryTribocorrosionChemical Mechanical PolishingInterfacial ChemistryCorrosion ResistanceElectrochemistryCorrosion Inhibition