A CSM/TFM imaging scheme for Silicon-On-Nothing ScAlN pMUT arrays

Abstract

This work presents preliminary experimental results on the 2D imaging capability of Silicon-On-Nothing (SON) Scandium-doped Aluminium Nitride (ScAlN) pMUT linear arrays. The Common Source Method (CSM) was used for the array actuation and data acquisition, whereas the Total Focusing Method (TFM) was employed for the image reconstruction. This is the first time that the CSM/TFM scheme is deployed together with these pMUT linear array type for imaging. The resulting 2D imaging results have high SNR and offer accurate localization of the reflector position with a mean localization error less than 0.5 mm across all experimental scenarios presented. These results highlight the 2D imaging strength of the novel SON ScAlN pMUTs and their suitability for biomedical and industrial applications.